Heating Element
DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. As their SEA authorised service provider and distributor, we provide in-site installations, services, refuribishment and burn-in services.
Vulcan Semiconductor Diffusion Heater (1350°C)
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Designed for high-temp operations
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Built-in reinforcements to guard against element sagging at zone interfaces
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End vestibules resistant to cracking and shrinking under stress
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High-strength ceramic interlocking separators
Hercules Semiconductor Diffusion Heater (1300°C)
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Built-in reinforcements to guard against element sagging at zone interfaces
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End vestibules resistant to cracking and shrinking under stress
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High-strength ceramic interlocking separators
Mercury Semiconductor Diffusion Heater
(350°C-1250°C)
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Designed for fast ramp, fast cool operations
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Proprietary open coil helix design for greater radiant energy transfer
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Line voltage feature available to eliminate transformers
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Standard terminal leads available to facilitate electrical connections
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