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Diffusion Furnace

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Our partner, Tarius Technology Private Limited, specialised in the manufacturing and designing various diffusion furnaces types for the semiconductor industry. As their exclusive SEA partner, we provide local installations and in-site services by our professionally trained crews. 

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Diffusion Furnace

Our diffusion furnaces are designed for optimum temperature accuracy and stability. Enclosed in a unitized, rugged, and thermally insulated cabinet structure, up to 4 heating elements are packaged for extended service life.

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RCH Steamer Unit

The only effective solution for generating ultra high purity steam that is used for wet oxidation and steam annealing of silicon and other semiconductor materials that doesn’t require H2.

 

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Bubbler Temperature Controller 

Being a standalone liquid source temperature controller, it consists of exchangeable temperature probe

and analog and ethernet fieldbus communication, resulting in fast PID control reaction on temperature fluctuations. It also has strong cooling capacity reaching 20°C below ambient temperature.

More products can be viewed via:

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Tarius Technology

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Got a product that suits your needs?

Contact Us

18 Sin Ming Lane, #05-01 Midview City, Singapore 573960

Tel: +65 6459 5962

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